SiCN thin film prepared at room temperature by r.f. reactive sputtering

Wu, X. C. / Cai, R. Q. / Yan, P. X. et al. | British Library Online Contents | 2002

Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Huang, F. / Song, Q. / Li, M. et al. | British Library Online Contents | 2008

Effect of Temperature on Optical Properties of TiO~2 Thin Film Prepared by DC Reactive Magnetron Sputtering

Wang, H.-q. / Shen, H. / Ba, D.-c. et al. | British Library Online Contents | 2005

Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering

Chappe, J. M. / Martin, N. / Pierson, J. F. et al. | British Library Online Contents | 2004

Properties of zirconia thin films prepared by reactive magnetron sputtering

Hembram, K. P. / Mohan Rao, G. | British Library Online Contents | 2007