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    Si-based Multielement Thin Film Prepared by r.f. Reactive Sputtering at Room Temperature

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    Si-based Multielement Thin Film Prepared by r.f. Reactive Sputtering at Room Temperature

    New search for: Wu, X.
    New search for: Wang, Y.
    New search for: Yan, H.
    New search for: Chen, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Si-based Multielement Thin Film Prepared by r.f. Reactive Sputtering at Room Temperature

    New search for: Wu, X.
    New search for: Wang, Y.
    New search for: Yan, H.
    New search for: Chen, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Si-based Multielement Thin Film Prepared by r.f. Reactive Sputtering at Room Temperature

    Contributors:

    Wu, X. (author) / Wang, Y. (author) / Yan, H. (author) / Chen, G. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 15 ; 385

    Publication date:

    1999-01-01

    Size:

    385 pages

    ISSN:

    1005-0302

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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