Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering
Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering
Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering
Chappe, J. M. (Autor:in) / Martin, N. (Autor:in) / Pierson, J. F. (Autor:in) / Terwagne, G. (Autor:in) / Lintymer, J. (Autor:in) / Gavoille, J. (Autor:in) / Takadoum, J. (Autor:in)
APPLIED SURFACE SCIENCE ; 225 ; 29-38
01.01.2004
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Titanium oxynitride thin films sputter deposited by the reactive gas pulsing process
British Library Online Contents | 2007
|British Library Online Contents | 2008
|British Library Online Contents | 2013
|British Library Online Contents | 2012
|Properties of zirconia thin films prepared by reactive magnetron sputtering
British Library Online Contents | 2007
|