Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering

Peng, Y. / Zhou, J. / Zhao, B. et al. | British Library Online Contents | 2011

Si-based Multielement Thin Film Prepared by r.f. Reactive Sputtering at Room Temperature

Wu, X. / Wang, Y. / Yan, H. et al. | British Library Online Contents | 1999

Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering

Peng, Y. / Zhou, J. / Gong, J. et al. | British Library Online Contents | 2014

Low-Temperature Growth and Photoluminescence of SiCN Nanoparticle Film by Consecutive RF Magnetron Sputtering

Xu, M. / Ng, V. M. / Huang, S. Y. et al. | British Library Online Contents | 2004

Growth of SiCN films by magnetron sputtering

Wei, J. / Gao, Y. / Zhang, D. H. et al. | British Library Online Contents | 2000