Defect production and annealing in ion implanted silicon carbide

Heft, A. / Wendler, E. / Bachmann, T. et al. | British Library Online Contents | 1995

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. et al. | British Library Online Contents | 2000

Effect of Hot Isostatic Press Annealing for Ion-Implanted Silicon Carbide

Hirabayashi, Y. / Furuya, M. / Hirai, K. et al. | British Library Online Contents | 1998

Laser annealing of Al implanted silicon carbide: Structural and optical characterization

Boutopoulos, C. / Terzis, P. / Zergioti, I. et al. | British Library Online Contents | 2007

Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. et al. | British Library Online Contents | 2001