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Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX
Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX
Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX
Hong, M.-H. (Autor:in) / Chung, J. (Autor:in) / Namavar, F. (Autor:in) / Pirouz, P. (Autor:in)
MATERIALS SCIENCE FORUM ; 338/342 ; 525-528
01.01.2000
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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