Accurate infrared spectroscopy analysis in back-side damaged silicon wafers

Garrido, B. / Moreno, J. A. / Samitier, J. et al. | British Library Online Contents | 1993

Micro-Raman spectral analysis of the subsurface damage layer in machined silicon wafers

Chen, L.-Q. / Zhang, X. / Zhang, T.-Y. et al. | British Library Online Contents | 2000

Effect of Surface Damaged Layers on the Electronic Properties of Hg~1~-~xMn~xTe Wafers

Zewen, W. / Wanqi, J. / Peisen, L. | British Library Online Contents | 2007

Study on Subsurface Damage Model of the Ground Monocrystallinge Silicon Wafers

Zhang, Y.X. / Su, J.X. / Gao, W. et al. | British Library Online Contents | 2009

4H-SiC Wafers Studied by X-Ray Absorption and Raman Scattering

Xu, Q. / Sun, H.Y. / Chen, C. et al. | British Library Online Contents | 2012