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Thermal evolution of extended defects in implanted Si
Thermal evolution of extended defects in implanted Si
Thermal evolution of extended defects in implanted Si
Claverie, A. (Autor:in) / Colombeau, B. (Autor:in) / Ben Assayag, G. (Autor:in) / Bonafos, C. (Autor:in) / Cristiano, F. (Autor:in) / Omri, M. (Autor:in) / de Mauduit, B. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 269-277
01.01.2000
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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