Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via "Dip-Pen" Nanolithography and Wet Chemical Etching

Weinberger, D. A. / Hong, S. / Mirkin, C. A. et al. | British Library Online Contents | 2000

Nanometer Scale Materials - Characterization and Fabrication

Murday, J. S. / Colton, R. J. / Rath, B. B. | British Library Online Contents | 1993

Isotropic Etching of SiC

Stauden, T. / Niebelschutz, F. / Tonisch, K. et al. | British Library Online Contents | 2009

Proximal probe-based fabrication of nanometer-scale devices

Campbell, P. M. / Snow, E. S. | British Library Online Contents | 1998

Electron beam lithography and reactive ion etching of nanometer size features in niobium films

Piotrowski, T. T. / Piotrowska, A. / Kaminska, E. et al. | British Library Online Contents | 2001