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Fabrication of Nanometer-Scale Features by Controlled Isotropic Wet Chemical Etching

Love, J. C. / Paul, K. E. / Whitesides, G. M.

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Fabrication of Nanometer-Scale Features by Controlled Isotropic Wet Chemical Etching

Love, J. C. / Paul, K. E. / Whitesides, G. M.

Fabrication of Nanometer-Scale Features by Controlled Isotropic Wet Chemical Etching

Love, J. C. / Paul, K. E. / Whitesides, G. M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of Nanometer-Scale Features by Controlled Isotropic Wet Chemical Etching

Contributors:

Love, J. C. (author) / Paul, K. E. (author) / Whitesides, G. M. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 13 ; 604-607

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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