Channeling Measurements of Ion Implantation Damage in 4H-SiC

Kuznetsov, A. Y. / Janson, M. S. / Hallen, A. et al. | British Library Online Contents | 2001

Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

Zolnai, Z. / Khanh, N. Q. / Lohner, T. et al. | British Library Online Contents | 2003

Studies of Damage Accumulation in 4H Silicon Carbide by Ion-Channeling Techniques

Zhang, Y. / Gao, F. / Jiang, W. et al. | British Library Online Contents | 2005

Microstructure studies of the grinding damage in monocrystalline silicon wafers

Zhang, Y. / Kang, R. / Guo, D. et al. | British Library Online Contents | 2007

Damage channeling in femtosecond laser micro-structured SBN crystals

Rodenas, A. / Lamela, J. / Jaque, F. et al. | British Library Online Contents | 2008