Effect of nitrogen content on phase configuration, nanostructure and mechanical behaviors in magnetron sputtered SiCxNy thin films

Wang, J. P. / Lu, Y. H. / Shen, Y. G. | British Library Online Contents | 2010

Transition metal carbonitride-SiCxNy composite ceramic and preparation method thereof

JIA YUJUN / WANG YAWEN / LIU ZHIQIANG et al. | Europäisches Patentamt | 2024

Structural analysis and microstructural observation of SiCxNy films prepared by reactive sputtering of SiC in N2 and Ar

Xiao, X. c. / Li, Y. w. / Song, L. x. et al. | British Library Online Contents | 2000

Nitrogen pulsing to modify the properties of titanium nitride thin films sputter deposited

Martin, N. / Lintymer, J. / Gavoille, J. et al. | British Library Online Contents | 2002

Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films

Shen, Y. G. | British Library Online Contents | 2003