Stress effects on defects and dopant diffusion in Si

Aziz, M. J. | British Library Online Contents | 2001

Dopant diffusion control by adding carbon into Si and SiGe: principles and device application

Osten, H. J. / Knoll, D. / Rucker, H. | British Library Online Contents | 2001

Dopant redistribution and formation of electrically active complexes in SiGe

Kuznetsov, A. Y. / Christensen, J. S. / Monakhov, E. V. et al. | British Library Online Contents | 2001

Atomistic modeling of dopant implantation and annealing in Si: damage evolution, dopant diffusion and activation

Pelaz, L. / Marqués, L. A. / Aboy, M. et al. | British Library Online Contents | 2005

Enhanced Dopant Diffusion Effects in 4H Silicon Carbide

Phelps, G. J. / Wright, N. G. / Chester, E. G. et al. | British Library Online Contents | 2002