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Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers
Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers
Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers
Ishida, Y. (Autor:in) / Kushibe, M. (Autor:in) / Takahashi, T. (Autor:in) / Okumura, H. (Autor:in) / Yoshida, S. (Autor:in)
MATERIALS SCIENCE FORUM ; 389/393 ; 459-462
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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