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Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers
Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers
Investigation of the Relationship between Defects and Electrical Properties of 3C-SiC Epilayers
Ishida, Y. (author) / Kushibe, M. (author) / Takahashi, T. (author) / Okumura, H. (author) / Yoshida, S. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 459-462
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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