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Characterization of high-k gate dielectric/silicon interfaces
Characterization of high-k gate dielectric/silicon interfaces
Characterization of high-k gate dielectric/silicon interfaces
Miyazaki, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 190 ; 66-74
01.01.2002
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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