Creating sub-surface channels in PMMA with ion beam lithography in only one step

Gonin, Y. / Munnik, F. / Benninger, F. et al. | British Library Online Contents | 2003

Deep Punching PMMA

Satapathy, S. / Bless, S. | British Library Online Contents | 2000

Mechanical Behavior Simulation of PMMA for Nano Imprint Lithography Using Molecular Dynamics

Kim, J. Y. / Kim, J. H. / Choi, B. I. | British Library Online Contents | 2007

Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D. | British Library Online Contents | 2004

Variable Shaped Beam lithography

British Library Online Contents | 2009