Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD
Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD
Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD
Kim, Y.-T. (Autor:in) / Cho, S.-M. (Autor:in) / Hong, B. (Autor:in) / Suh, S.-J. (Autor:in) / Jang, G.-E. (Autor:in) / Yoon, D.-H. (Autor:in)
MATERIALS TRANSACTIONS ; 43 ; 2058-2062
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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