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The Study of High Temperature Annealing of a-SiC:H Films
The Study of High Temperature Annealing of a-SiC:H Films
The Study of High Temperature Annealing of a-SiC:H Films
Zhang, S. (Autor:in) / Hu, Z. (Autor:in) / Raniero, L. (Autor:in) / Liao, X. (Autor:in) / Ferreira, I. (Autor:in) / Fortunato, E. (Autor:in) / Vilarinho, P. M. (Autor:in) / Pereira, L. (Autor:in) / Martins, R. (Autor:in) / Vilarinho, P. M.
01.01.2006
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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