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Stress Measurement of Thin Films by Substrate Curvature Method
Stress Measurement of Thin Films by Substrate Curvature Method
Stress Measurement of Thin Films by Substrate Curvature Method
An, B. (Autor:in) / Zhang, T.-j. (Autor:in) / Yuan, C. (Autor:in)
MATERIALS PROTECTION -WUHAN- ; 36 ; 13-15
01.01.2003
3 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.1
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