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Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC
Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC
Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC
Morales, F. M. (Autor:in) / Molina, S. I. (Autor:in) / Araujo, D. (Autor:in) / Cimalla, V. (Autor:in) / Pezoldt, J. (Autor:in) / Bergman, P. / Janzen, E.
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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