Micro-Raman spectral analysis of the subsurface damage layer in machined silicon wafers

Chen, L.-Q. / Zhang, X. / Zhang, T.-Y. et al. | British Library Online Contents | 2000

4H-SiC Wafers Studied by X-Ray Absorption and Raman Scattering

Xu, Q. / Sun, H.Y. / Chen, C. et al. | British Library Online Contents | 2012

Raman Microspectroscopy Study on the Ground Surface of Monocrystalline Silicon Wafers

Zhang, Y. X. / Kang, R. K. / Guo, D. M. et al. | British Library Online Contents | 2006

Raman back-scattering study of damaged and strain subsurface layers in GaAs wafers

Fengyi, Z. / Hailing, T. / Jiayu, Q. et al. | British Library Online Contents | 2000

Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging

Mikulik, P. / Lubbert, D. / Pernot, P. et al. | British Library Online Contents | 2006