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Interface control by modified sputtering on Pt/HfO2/Si system
Interface control by modified sputtering on Pt/HfO2/Si system
Interface control by modified sputtering on Pt/HfO2/Si system
Nam, S. (Autor:in) / Nam, S. W. (Autor:in) / Yoo, J. H. (Autor:in) / Ko, D. H. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 123-127
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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