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Interface control by modified sputtering on Pt/HfO2/Si system
Interface control by modified sputtering on Pt/HfO2/Si system
Interface control by modified sputtering on Pt/HfO2/Si system
Nam, S. (author) / Nam, S. W. (author) / Yoo, J. H. (author) / Ko, D. H. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 123-127
2003-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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