Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy

Raineri, V. / Giannazzo, F. / Calcagno, L. et al. | British Library Online Contents | 2002

Two-Dimensional Dopant Profiling by Scanning Capacitance Microscopy

Williams, C. C. | British Library Online Contents | 1999

Two-dimensional dopant profiling by scanning capacitance force microscopy

Kimura, K. / Kobayashi, K. / Yamada, H. et al. | British Library Online Contents | 2003

Scanning capacitance microscopy two-dimensional carrier profiling for ultra-shallow junction characterization in deep submicron technology

Giannazzo, F. / Raineri, V. / Mirabella, S. et al. | British Library Online Contents | 2005

Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors

Kopanski, J. J. / Marchiando, J. F. / Lowney, J. R. | British Library Online Contents | 1997