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Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers
Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers
Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers
Neudeck, P. G. (Autor:in) / Powell, J. A. (Autor:in) / Trunek, A. J. (Autor:in) / Spry, D. J. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 169-174
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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