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Potential of HMDS/C~3H~8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)
Potential of HMDS/C~3H~8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)
Potential of HMDS/C~3H~8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)
Ferro, G. (Autor:in) / Camassel, J. (Autor:in) / Juillaguet, S. (Autor:in) / Balloud, C. (Autor:in) / Polychroniadis, E. K. (Autor:in) / Stoimenos, Y. (Autor:in) / Seigle-Ferrand, P. (Autor:in) / Dazord, J. (Autor:in) / Monteil, Y. (Autor:in) / Rushworth, S. A. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 281-284
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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