Potential of HMDS/C~3H~8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100): Fid-Bau Portal

Potential of HMDS/C~3H~8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)

Ferro, G. / Camassel, J. / Juillaguet, S. / Balloud, C. / Polychroniadis, E. K. / Stoimenos, Y. / Seigle-Ferrand, P. / Dazord, J. / Monteil, Y. / Rushworth, S. A.

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Potential of HMDS/C~3H~8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)

Ferro, G. / Camassel, J. / Juillaguet, S. / Balloud, C. / Polychroniadis, E. K. / Stoimenos, Y. / Seigle-Ferrand, P. / Dazord, J. / Monteil, Y. / Rushworth, S. A.

Potential of HMDS/C~3H~8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)

Ferro, G. / Camassel, J. / Juillaguet, S. / Balloud, C. / Polychroniadis, E. K. / Stoimenos, Y. / Seigle-Ferrand, P. / Dazord, J. / Monteil, Y. / Rushworth, S. A.

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Title:

Potential of HMDS/C~3H~8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)

Contributors:

Ferro, G. (author) / Camassel, J. (author) / Juillaguet, S. (author) / Balloud, C. (author) / Polychroniadis, E. K. (author) / Stoimenos, Y. (author) / Seigle-Ferrand, P. (author) / Dazord, J. (author) / Monteil, Y. (author) / Rushworth, S. A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 281-284

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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