The Study of Microcrystalline Silicon Thin Films Prepared by PECVD

Li, C.Y. / Zhang, H. / Li, J. et al. | British Library Online Contents | 2013

The study of the substrate temperature depended growth properties of microcrystalline silicon films deposited by VHF-PECVD method

Chen, Y. / Chen, X. / Hao, X. et al. | British Library Online Contents | 2013

Hydrogenated microcrystalline silicon films prepared by VHF-PECVD and single junction solar cell

Wu, Z. / Lei, Q. / Xi, J. et al. | British Library Online Contents | 2006

Nanostructure and photocatalytic properties of TiO2 films deposited at low temperature by pulsed PECVD

Li, D. / Bulou, S. / Gautier, N. et al. | British Library Online Contents | 2019

Nanostructure and photocatalytic properties of TiO2 films deposited at low temperature by pulsed PECVD

Li, D. / Bulou, S. / Gautier, N. et al. | British Library Online Contents | 2019