The Study of Microcrystalline Silicon Thin Films Prepared by PECVD

Li, C.Y. / Zhang, H. / Li, J. et al. | British Library Online Contents | 2013

Low Temperature ECR-PECVD Microcrystalline SiC Growth by Pulsed Gas Flows

Hernandez, M. J. / Cervera, M. / Piqueras, J. et al. | British Library Online Contents | 2004

Hydrogenated microcrystalline silicon films prepared by VHF-PECVD and single junction solar cell

Wu, Z. / Lei, Q. / Xi, J. et al. | British Library Online Contents | 2006

Structural analysis of silicon oxynitride films deposited by PECVD

Criado, D. / Alayo, M. I. / Pereyra, I. et al. | British Library Online Contents | 2004

Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz

Raniero, L. / Martins, R. / Aguas, H. et al. | British Library Online Contents | 2004