Growth of high quality epitaxial Si1-x-yGexCy layers by using chemical vapor deposition

Hallstedt, J. / Suvar, E. / Persson, P. O. et al. | British Library Online Contents | 2004

Growth of Thick Epitaxial 4H-SiC Layers by Chemical Vapor Deposition

Kordina, O. / Irvine, K. / Sumakeris, J. et al. | British Library Online Contents | 1998

Epitaxial growth of Si by low-energy DC-plasma chemical vapor deposition

Mateeva, E. / Deller, H. R. / Kafader, U. et al. | British Library Online Contents | 1998

Epitaxial growth of -SiC on silicon by bias-assisted hot filament chemical vapor deposition from solid graphite and silicon sources

Woo, H. K. / Lee, C. S. / Bello, I. et al. | British Library Online Contents | 1998

Low-temperature chemical vapor deposition of highly doped n-type epitaxial Si at high growth rate

Nguyen, N. D. / Loo, R. / Caymax, M. | British Library Online Contents | 2008