Reducing Stacking Faults in Highly Doped N-Type 4H-SiC Crystal

Kojima, K. / Kato, T. / Ito, S. et al. | British Library Online Contents | 2011

Characterization of Double Stacking Faults Induced by Thermal Processing of Heavily N-Doped 4H-SiC Substrates

Skromme, B. J. / Mikhov, M. K. / Chen, L. et al. | British Library Online Contents | 2004

Generation of Oxidation Induced Stacking Faults in Cz Silicon Wafers

Sueoka, K. / Akatsuka, M. / Nishihara, K. et al. | British Library Online Contents | 1995

Specific Aspects of Type II Heteropolytype Stacking Faults in SiC

Juillaguet, S. / Camassel, J. | British Library Online Contents | 2005

Stacking Fault Formation in Highly Nitrogen-Doped 4H-SiC Substrates with Different Surface Preparation Conditions

Katsuno, M. / Nakabayashi, M. / Fujimoto, T. et al. | British Library Online Contents | 2009