Modeling of magnetron sputtering plasmas

Shon, C. H. / Lee, J. K. | British Library Online Contents | 2002

Microtool coatings using magnetron sputtering

Yang, S.C. / Cooke, K. / Aramcharoen, A. et al. | British Library Online Contents | 2011

Characteristics of unbalanced magnetron sputtering systems

Golosov, D. A. / Svadkovskii, I. V. / Zavadskii, S. M. | British Library Online Contents | 2002

Advanced coatings through pulsed magnetron sputtering

Kelly, P. J. / Hisek, J. / Zhou, Y. et al. | British Library Online Contents | 2004

Mechanical properties of the plasma-enhanced magnetron sputtering Si-C-N coatings

Wang, Y. / Li, Z. / Du, J. et al. | British Library Online Contents | 2010