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SIMS study on N diffusion in hafnium oxynitride

Gui, D. / Kang, J. / Yu, H. / Lim, H. F.

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SIMS study on N diffusion in hafnium oxynitride

Gui, D. / Kang, J. / Yu, H. / Lim, H. F.

SIMS study on N diffusion in hafnium oxynitride

Gui, D. / Kang, J. / Yu, H. / Lim, H. F.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SIMS study on N diffusion in hafnium oxynitride

Contributors:

Gui, D. (author) / Kang, J. (author) / Yu, H. (author) / Lim, H. F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 590-593

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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Quantitative depth profiling of nitrogen in ultrathin oxynitride film with low energy SIMS

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