Sub-keV secondary ion mass spectrometry depth profiling: comparison of sample rotation and oxygen flooding

Liu, R. / Wee, A. T. S. | British Library Online Contents | 2004

Roughness development in the depth profiling with 500eV O2+ beam with the combination of oxygen flooding and sample rotation

Gui, D. / Xing, Z. X. / Huang, Y. H. et al. | British Library Online Contents | 2008

High depth resolution depth profiling of metal films using SIMS and sample rotation

Sykes, D. E. / Chew, A. / Hems, J. et al. | British Library Online Contents | 1996

Oxide thin films formed during rotational AES sputter depth profiling of Ni/Cr multilayers using oxygen ions

Zalar, A. / Seibt, E. W. / Panjan, P. | British Library Online Contents | 1996

Oxide thin films formed during rotational AES sputter depth profiling of Ni/Cr multilayers using oxygen ions

Zalar, A. / Seibt, E. W. / Panjan, P. | British Library Online Contents | 1996