Hetero-Epitaxial Growth of 3C-SiC on Carbonized Silicon Substrates

Shimizu, H. / Hisada, K. | British Library Online Contents | 2003

Hetero-Epitaxial Growth of 3C-SiC on Silicon Substrates by Plasma Assisted CVD

Shimizu, H. / Aoyama, Y. | British Library Online Contents | 2006

Stress Evaluation on Hetero-Epitaxial 3C-SiC Films on (100) Si Substrates

Anzalone, R. / Camarda, M. / Locke, C. et al. | British Library Online Contents | 2012

Low Temperature Selective and Lateral Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates

Jacob, C. / Pirouz, P. / Nishino, S. | British Library Online Contents | 2001

Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane

Jacob, C. / Hong, M.-H. / Chung, J. et al. | British Library Online Contents | 2000