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Laser patterning of SiOx-layers for the fabrication of UV diffractive phase elements
Laser patterning of SiOx-layers for the fabrication of UV diffractive phase elements
Laser patterning of SiOx-layers for the fabrication of UV diffractive phase elements
Schulz-Ruhtenberg, M. (Autor:in) / Ihlemann, J. (Autor:in) / Heber, J. (Autor:in)
APPLIED SURFACE SCIENCE ; 248 ; 190-195
01.01.2005
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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