Laser patterning of SiOx-layers for the fabrication of UV diffractive phase elements

Schulz-Ruhtenberg, M. / Ihlemann, J. / Heber, J. | British Library Online Contents | 2005

Excimer laser ablation patterning of dielectric layers

Ihlemann, J. / Wolff-Rottke, B. | British Library Online Contents | 1995

Excimer laser fabrication of diffractive optical elements

Winfield, R. J. / Meister, M. / Crean, G. M. et al. | British Library Online Contents | 2000

Excimer Laser Fabrication of Low Cost Diffractive Optical Elements

Flury, M. / Fontaine, J. / Gerard, P. et al. | British Library Online Contents | 2001

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

Flury, M. / Benatmane, A. / Gerard, P. et al. | British Library Online Contents | 2003