Boron diffusion in strained and strain-relaxed SiGe

Wang, C. C. / Sheu, Y. M. / Liu, S. et al. | British Library Online Contents | 2005

Defect imaging of SiGe strain relaxed buffers grown by LEPECVD

Marchionna, S. / Virtuani, A. / Acciarri, M. et al. | British Library Online Contents | 2006

Thin strain-relaxed SiGe grown by ultrahigh vacuum chemical vapor deposition

Xu, X. / Kweh, H. / Zhang, Z. et al. | British Library Online Contents | 2006

Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Sawano, K. / Kawaguchi, K. / Ueno, T. et al. | British Library Online Contents | 2002

Phosphorus diffusion in the presence of threading dislocations in strain relaxed SiGe films

Christensen, J. S. / Kuznetsov, A. Y. / Gunnaes, A. E. et al. | British Library Online Contents | 2006