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Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials—some comments
Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials—some comments
Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials—some comments
Karunaratne, M. S. (Autor:in) / Bonar, J. M. (Autor:in) / Ashburn, P. (Autor:in) / Willoughby, A. F. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 41 ; 1013-1016
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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