The structural deformations in the Si/SiGe system induced by thermal annealing

Zheng, S. / Mori, M. / Tambo, T. et al. | British Library Online Contents | 2007

Evolution of SiGe nanoclusters and micro defects in the Si1-xGex layer fabricated by two-step ion implantation and subsequent thermal annealing

Xu, W. / Tu, H. / Xiao, Q. et al. | British Library Online Contents | 2011

Fabrication of SiGe-on-insulator by rapid thermal annealing of Ge on Si-on-insulator substrate

Kutsukake, K. / Usami, N. / Fujiwara, K. et al. | British Library Online Contents | 2004

Thermal annealing effects on a compositionally graded SiGe layer fabricated by oxidizing a strained SiGe layer

Cai, K. / Li, C. / Zhang, Y. et al. | British Library Online Contents | 2008

Rapid thermal oxidation of epitaxial SiGe thin films

Terrasi, A. / Scalese, S. / Adorno, R. et al. | British Library Online Contents | 2002