Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

Kalinina, E. / Kholujanov, G. / Sitnikova, A. et al. | British Library Online Contents | 2003

Platinium gettering in silicon: precipitation of PtSi on diffusion induced dislocations and on SiP precipitates

Correia, A. / Pichaud, B. / Lhorte, A. et al. | British Library Online Contents | 1995

Far-Action Radiation Defects and Gettering Effects in 4H-SiC Implanted with Al Ions

Kalinina, E.V. / Zamoryanskaya, M.V. / Kolesnikova, E.V. et al. | British Library Online Contents | 2009

Gettering efficiencies of polysilicon-, stacking fault- and He-implanted backsides for Cu and Ni

Hoelzl, R. / Range, K. J. / Fabry, L. et al. | British Library Online Contents | 2000

Avoiding end-of-range dislocations in ion-implanted silicon

Acco, S. / Custer, J. S. / Saris, F. W. | British Library Online Contents | 1995