Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

Kalinina, E. / Kholujanov, G. / Sitnikova, A. et al. | British Library Online Contents | 2003

Metallic impurity gettering to defects remaining in the RP/2 region of MeV-ion implanted and annealed silicon

Peeva, A. / Koegler, R. / Brauer, G. et al. | British Library Online Contents | 2000

Effect of implanted O on gettering of Au at dislocations in Si

Mohapatra, S. / Mahapatra, D. P. | British Library Online Contents | 2006

Gettering efficiencies of polysilicon-, stacking fault- and He-implanted backsides for Cu and Ni

Hoelzl, R. / Range, K. J. / Fabry, L. et al. | British Library Online Contents | 2000

Electrical activity of extended defects and gettering of metallic impurities in silicon

Kusanagi, S. / Sekiguchi, T. / Shen, B. et al. | British Library Online Contents | 1995