Excimer-laser doping of spin-on dopant in silicon

Wong, Y. W. / Yang, X. Q. / Chan, P. W. et al. | British Library Online Contents | 1993

Excimer laser doping techniques for II-VI semiconductors

Hatanaka, Y. / Niraula, M. / Nakamura, A. et al. | British Library Online Contents | 2001

Excimer laser-induced doping of crystalline silicon carbide films

Krishnan, S. / D'Couto, G. C. / Chaudhry, M. I. et al. | British Library Online Contents | 1995

Excimer laser fabrication of diffractive optical elements

Winfield, R. J. / Meister, M. / Crean, G. M. et al. | British Library Online Contents | 2000

Selective emitter formation by laser doping of spin-on sources

Prathap, P. / Bartringer, J. / Slaoui, A. | British Library Online Contents | 2013