Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

Lopez, E. / Chiussi, S. / Serra, J. et al. | British Library Online Contents | 2004

ArF-excimer laser induced chemical vapour deposition of amorphous hydrogenated SiGeC films

Lopez, E. / Chiussi, S. / Serra, C. et al. | British Library Online Contents | 2003

Electron microscopy of fullerene thin films grown on solid surfaces

Saito, Y. / Yoshikawa, T. / Ishikawa, Y. et al. | British Library Online Contents | 1993

Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS

Py, M. / Saracco, E. / Damlencourt, J. F. et al. | British Library Online Contents | 2011

A new process to manufacture thin SiGe and SiGeC epitaxial films on silicon by ion implantation and excimer laser annealing

Boher, P. / Stehle, J. L. / Fogarassy, E. | British Library Online Contents | 1999