Discrete -Ta~2O~5 crystallite formation in reactively sputtered amorphous thin films

Beckage, P. J. / Knorr, D. B. / Wu, X. M. et al. | British Library Online Contents | 1998

Growth mechanism of reactively sputtered aluminum nitride thin films

Hwang, B. H. / Chen, C. S. / Lu, H. Y. et al. | British Library Online Contents | 2002

Reactively sputtered WO~xN~y films

Shen, Y. G. / Mai, Y. W. | British Library Online Contents | 2000

Stress stability and thermo-mechanical properties of reactively sputtered alumina films

Hughey, M. P. / Cook, R. F. / Thurn, J. | British Library Online Contents | 2005

Temperature dependence of resistance in reactively sputtered RuO~2 thin films

Tong, K. Y. / Jelenkovic, V. / Cheung, W. Y. et al. | British Library Online Contents | 2001