Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003

SIMS backside depth profiling of ultra shallow implants

Yeo, K. L. / Wee, A. T. / See, A. et al. | British Library Online Contents | 2003

Accurate depth profiling for ultra-shallow implants using backside-SIMS

Hongo, C. / Tomita, M. / Takenaka, M. | British Library Online Contents | 2004

Estimation of ultra-shallow implants using SIMS, NRA and chemical analysis

Tomita, M. / Suzuki, M. / Tachibe, T. et al. | British Library Online Contents | 2003

Toward accurate in-depth profiling of As and P ultra-shallow implants by SIMS

Merkulov, A. / de Chambost, E. / Schuhmacher, M. et al. | British Library Online Contents | 2004