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Comparison between the SIMS and MEIS techniques for the characterization of ultra shallow arsenic implants

Giubertoni, D. / Bersani, M. / Barozzi, M. / Pederzoli, S. / Iacob, E. / van den Berg, J. A. / Werner, M.

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Comparison between the SIMS and MEIS techniques for the characterization of ultra shallow arsenic implants

Giubertoni, D. / Bersani, M. / Barozzi, M. / Pederzoli, S. / Iacob, E. / van den Berg, J. A. / Werner, M.

Comparison between the SIMS and MEIS techniques for the characterization of ultra shallow arsenic implants

Giubertoni, D. / Bersani, M. / Barozzi, M. / Pederzoli, S. / Iacob, E. / van den Berg, J. A. / Werner, M.

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Check availability in my library

Order at Subito €

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Document information

Title:

Comparison between the SIMS and MEIS techniques for the characterization of ultra shallow arsenic implants

Contributors:

Giubertoni, D. (author) / Bersani, M. (author) / Barozzi, M. (author) / Pederzoli, S. (author) / Iacob, E. (author) / van den Berg, J. A. (author) / Werner, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7214-7217

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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