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Design and control of porosity in oxide thin films grown by PECVD
Design and control of porosity in oxide thin films grown by PECVD
Design and control of porosity in oxide thin films grown by PECVD
Borrás, A. (Autor:in) / Barranco, A. (Autor:in) / González-Elipe, A. R. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 41 ; 5220-5226
01.01.2006
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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