Surface analytical studies of Ar-plasma etching of thin heptadecafluoro-1-decene plasma polymer films: Fid-Bau Portal

Surface analytical studies of Ar-plasma etching of thin heptadecafluoro-1-decene plasma polymer films

Wang, X. / Grundmeier, G.

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Surface analytical studies of Ar-plasma etching of thin heptadecafluoro-1-decene plasma polymer films

Wang, X. / Grundmeier, G.

Surface analytical studies of Ar-plasma etching of thin heptadecafluoro-1-decene plasma polymer films

Wang, X. / Grundmeier, G.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Surface analytical studies of Ar-plasma etching of thin heptadecafluoro-1-decene plasma polymer films

Contributors:

Wang, X. (author) / Grundmeier, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 8331-8336

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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